Wafer Fabrication
Customized design, prototyping & small series production
Surface-acoustic-wave based components - scaled to wafer-level
We have years of experience in designing, manufacturing and analyzing SAW-based microacoustic chips and systems - for reliable, scalable and cost-efficient solutions.
Our patented manufacturing technology allows for the integration of SAW transducers and custom microchannel designs at waferscale, coming along with easy-to-handle chip-cartridge solutions and optimized experimental setups.
Let us help you to focus on your application, while we provide the technical expertise.
Aerosol & droplet generation
IDT design
Mixing of fluids & suspensions
Whether you are looking for a new transducer layout or improve existing ones, we have the expertise and resources to support you every step of the way.
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Handling of particles & cells
what else ?
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Wafer fabrication
Bild eines kompletten prozessierten Wafers einfügen
We offer customized wafer fabrication from single prototypes to small-series production.
up to 6” LiNbO3 wafer substrates
laser lithography (≥ 2 µm resolution)
metal evaporation (Au, Al, Ti, …)
high-quality SiO2 sputtering
reactive ion etching
Integrated microchannels
We integrate customized microchannel designs with SAW actuator or sensor devices directly on wafer level using our proprietary epoxy lithography.
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PDMS masters
Bilder von DFR Strukturen
We offer waferscale masters for conventional PDMS soft-lithography approaches.
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Device characterization
Bild eines Technikers am Mikroskop
We offer customized wafer fabrication from single prototypes to small-series production.
optical analysis
electrical characterization
structural analysis
wave-field vibrometer measurements